System: hexachlorodisilane/titanium chloride (TiCl4)
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| 1) hexachlorodisilane | |
|---|---|
| DECHEMA ID | 6558 |
| Formula | Cl6Si2 |
| Synonym | HCDS |
| Synonym | disilicon hexachloride |
| Synonym | disilane, hexachloro- |
| Synonym | zhcds cvd precursor |
| Synonym | 1,1,1,2,2,2-hexachlorodisilane |
| Synonym | disilane, 1,1,1,2,2,2-hexachloro- |
| Synonym | perchlorodisilane |
| InChi-Key | LXEXBJXDGVGRAR-UHFFFAOYSA-N |
| Registry No. | 13465-77-5 |
| 2) titanium chloride (TiCl4) | |
| DECHEMA ID | 40344 |
| Formula | Cl4Ti |
| Synonym | titanium tetrachloride |
| Synonym | (T-4)-titanium chloride |
| Synonym | titanium-IV-chloride |
| Synonym | titanium(IV) chloride |
| Synonym | titanium(4+) chloride |
| InChi-Key | XJDNKRIXUMDJCW-UHFFFAOYSA-J |
| Registry No. | 7550-45-0 |
Available physical property data:
| Property | Phase | No. of tables | No. of lines | Data |
|---|---|---|---|---|
| eutectic | - | 1 | 1 | View |